Monte Carlo Simulations of Elastic Scattering with Applications to DC and High Power Pulsed Magnetron Sputtering for Ti3SiC2. Communications in Computational Physics, [S. l.], v. 11, n. 5, p. 1618–1642, 2012. DOI: 10.4208/cicp.210211.270511a. Disponível em: https://www.global-sci.com/index.php/cicp/article/view/5958. Acesso em: 5 dec. 2025.